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PM Exhaust Device

ITEM Name
ATP-2001
Product Description

ATP-2001 is a PM exhaust device specialized for sites in the semiconductor
industry. It collects various harmful gases, volatile organic compounds (VOCs),
odors, and fumes generated during PM work, discharges them through
the exhaust duct, and improves the environment in the FAB.

Characteristics
  • - A wafer storage box is attached, so wafers can be stored.
  • - Wafer collection trash with push door is applied to facilitate disposal
    of chemicals.
  • - ARM LOCK device is applied, so workers can work safely during exhaustion.
  • - The input and output terminals are designed to be changed upon user
    request, so it can be used as site-specific type.
Product Specifications
Category Specification
Body Size480(W)x690(D)x700(H)
Weight118kg
TypeExhaust
Exhaust TypeAcid exhaust/CV type
Exhaust SpecØ 100.120 / 45.50.58
Discharge pressure115mmAq
Maximum wind volume17.1 ㎥ / min
Current3A
Power consumption600W
HOOD SIZEØ 650
ARM SIZE1450/1950, Ø125
CertificateISO 9001, ISO 14001
ITEM Name
ATP-2005
Product Description

ATP-2005 is a lightweight product that is designed to be easier for female
workers to use. In addition, CV-ADAPTER is applied separately so that
the user can autonomously replace it in the site. It collects various harmful
gases, volatile organic compounds (VOCs), odors, and fumes generated
during PM work, discharges them through the exhaust duct, and improves
the environment in FAB.

Characteristics
  • - CV-ADAPTER is applied separately, so it can be exchanged according
    to duct size on site by the user
  • - It is easy to move and operate thanks to its lightweight (less than 100kg).
  • - The suction and discharge ends are made of urethane to prevent static
    electricity and bellows with improved durability is applied
  • - The bellows at the discharge end can be extended and used in connection
    with a distant discharge system.
Product Specifications
Category Specification
Body Size500(W)x600(D)x1000(H)
Weight97kg
TypeExhaust
Exhaust TypeAcid exhaust/CV type
Exhaust SpecØ 100 / 45.50.58
Discharge pressure115mmAq
Maximum wind volume17.1 ㎥ / min
Current3A
Power consumption600W
HOOD SIZEØ 450
ARM SIZE1450, Ø125
CertificateISO 9001, ISO 14001
ITEM Name
ATP-3000
Product Description

ATP-3000 is a filter-type product that can be used without connecting it
to a separate exhaust line, so it can be used in any environment.
In addition, it can be used safely because it went through testing,
such as purification, acid, base, and VOC tests, by each certification agency.

Characteristics
  • - It can remove acid, base, VOC, and gas, making it safe to use in industrial
    sites, and laboratories and research facilities where duct installation is difficult.
  • - Its safety can be guaranteed because it went through certification of
    purification, acid, base, and VOCs test results.
  • - ULPA Filter : UIPA filter, which removes 99.99% of fine dust of 0.1 ㎛ particles
    (KOLAS certified), is used.
Product Specifications
Category Specification
Body Size530(W)x583(D)x1030(H)
Weight135kg
TypeAcetone & ethanol filter
Exhaust TypeFiltering (Natural exhaust)
Exhaust SpecNatural exhaust
Discharge pressure452mmAq
Maximum wind volume10 ㎥ / min
Current5.14A
Power consumption950W
HOOD SIZEØ 450
ARM SIZE1450, Ø125
CertificateISO 9001, ISO 14001
ITEM Name
ATP-4001
Product Description

ATP-4001 is a product for narrow places that allows PM work to be done
after moving to a narrow place or a place with narrow passageway.
In addition, it is designed to apply CV-ADAPTER separately so that the user
can autonomously replace it in the site. It collects various harmful gases,
volatile organic compounds (VOCs), odors, and fumes generated during
PM work, discharges them through the exhaust duct, and improves the
Environment in the FAB.

Characteristics
  • - This product can be installed and used during PM work in a narrow place
    or a place with narrow passageway.
  • - Antistatic treated urethane bellows is applied, which can be extended
    to 75 mm.
  • - CV-ADAPTER can be replaced in the site so that the user can exchange
    it according to the duct size.
  • - Rotation, UP, DOWN, and variable are possible thanks to the application
    of ARM 4-stage joint.
Product Specifications
Category Specification
Body Size250(W)x250(W)x1450(H)
Weight900(W)x900(W)x2760(H)
Type12kg
Exhaust TypeExhaust
Exhaust SpecCV type
Discharge pressure45.50.58
Maximum wind volumeUrethane, 75mm
Current1.0m/s or higher, CV pressure proportional
Power consumption75mm
HOOD SIZEØ 450
ARM SIZEApplication of 4-stage joint
CertificateISO 9001, ISO 14001
ITEM Name
ATP-5001
Product Description

ATP-5001 is a cyclone type product that can effectively process powders
using a dust collection container. In addition, it is easy to exchange
and dispose of the dust collection container, increasing work efficiency during
PM work and piping work.

Characteristics
  • - Effective powder collection is possible thanks to the application
    of the cyclone method.
  • - It can be used without deformation by applying a dust collection container,
    and it is convenient to use because it can be replaced.
  • - The transparent window allows you to check the amount of powder loaded
    and makes it easy to dispose of powder.
  • - A dedicated sulfuric acid filter can be applied, and exhaust gas and fine
    fumes can be collected (sold separately).
Product Specifications
Category Specification
Body Size450(W)x450(D)x800(H)
Weight42.5kg
Type Exhaust
Exhaust TypeCV type
Exhaust Spec45.50.58
Discharge pressureUrethane, 125mm
Maximum wind volumeCyclone method
CurrentØ38
Power consumptionFor powder collection
HOOD SIZEDust collection container exchange method
ARM SIZEApplication of 4-stage joint
CertificateISO 9001, ISO 14001