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Products

Temperature Controller

ITEM Name
General Controller
Product Description

This product is a monitoring temperature controller for heating jackets
that controls temperature specifically for fore line and exhaust line.

Product Specifications
Category Specification
Model ATC-212(312)
Body Size 263(403)(W)x360(D)x312(H)
Type 1ch ~ 3ch / 4ch ~ 6ch
Supply Φ1 , 208V , 50/60㎐
Full Load Current 48A
S.C.C.R 5KA
AIC of Protective device 5KA
Current 8A / ch 
Power consumption 5KW
Alarm LBA, HIGH1, HIGH2, HBA
Weight 8kg / 13kg
Certificate CE
Characteristics
Item No. ATC-212(312)
  • - PID temperature control through 50 ms ultra-fast sampling
  • - Temperature and current monitoring are possible by supporting RS485 communication function (Modbus RTU method).
  • - ON/OFF control, phase control, and cycle control are possible
  • - Heater disconnection alarm (HBA) is applied exclusively to heating jackets.
  • - External contact interlock and controller on/off are possible.
ITEM Name
Multi Channel Controller
Product Description

This product is a multi-channel controller with individual temperature control
function specialized for heating jackets installed in gas lines
that require precise control.

Product Specifications
Category Specification
Model ATC-412
Body Size 550(W)x600(D)x1230(H)
Type 72ch
Supply Φ1 , 208V , 50/60㎐
Full Load Current 50A
S.C.C.R 10KA
AIC of Protective device 10KA
Current 0.7A / ch 
Power consumption 10KW
Alarm LBA, HIGH1
Weight 94kg
Certificate -
Characteristics
Item No. ATC-412
  • - PID temperature control through 50 ms ultra-fast sampling
  • - Temperature and current monitoring are possible by supporting RS485 communication function (Modbus RTU method)
  • - ON/OFF control, phase control, and cycle control are possible
  • - External contact interlock and controller on/off are possible
  • - Intuitive interface with an individual temperature controller
ITEM Name
Pre-Heating Controller
Product Description

This product is a heating jacket-specific temperature controller
that preheats wafers at the stage before transferring them
to the facility chamber.

Product Specifications
Category Specification
Model ATC-531
Body Size 603(W)x502(D)x213(H)
Type 6ch
Supply Φ3 , 208V , 50/60㎐
Full Load Current 50A
S.C.C.R 18KA
AIC of Protective device 18KA
Current 30A / ch
Power consumption 18KW
Alarm LBA, HIGH1, HIGH2, HIGH3
Weight 30kg
Certificate -
Characteristics
Item No. ATC-531
  • - PID temperature control through 50 ms ultra-fast sampling
  • - Temperature and current monitoring are possible by supporting RS485 communication function (Modbus RTU method).
  • - ON/OFF control, phase control, and cycle control are possible.
  • - High temperature cutoff AL 1: If the temperature of heater #1~4 is higher than the set temperature, power to #1~4 heaters is individually blocked.
  • - High temperature cutoff AL 2: Cut off all power to heaters #1~4 when the chamber temperature is higher than the set temperature.
  • - High temperature cutoff AL 3: If the temperature of wafers is higher than the set temperature, all power to heaters #1 to 4 is blocked.
  • - Overcurrent cutoff AL 4: ELCB trip when main heater current flow is more than 50 A.
  • - High device stability due to no inrush current