This is a product made of silicone coated cloth fabric and is the
most widely used product group in industrial sites. It is installed
in a wide range of sites such as semiconductor vacuum line,
gas line, and tank lorry to smooth the flow of each process.
ATNH Series | ||
---|---|---|
Spec | Operating Temp | Standard Temp. 180 ℃ Max. Temp. 200℃ |
Voltage | 100V ~ 220V * 50/60Hz | |
Materials | Outer Cloth | Silicon Coating E-glass Cloth |
Inner Cloth | Silicon Coating E-glass Cloth | |
Insulator | Silica needle mat | |
Element | Ni-Cr | |
Sensor | K-Type, PT100Ω | |
Fastener | Velcro , Snap Button | |
Applications | Process | Etch, Diffusion, CVD, Metal, Clean |
Section of use | Fore Line, Exhaust Line, Inside the facility(Pump, Scrubber, etc.) |
This product is made of PTFE coated cloth fabric and is mainly used
in sites where high temperature or particle management is required.
It is installed inside major facilities such as clean room and equipment
at major semiconductor sites to smooth the flow of each process.
Item No. ATPH Series | ||
---|---|---|
Spec | Operating Temp | Standard Temp. 260 ℃ Max. Temp. 300℃ |
Voltage | 100V ~ 220V * 50/60Hz | |
Materials | Outer Cloth | Teflon Coating Eglass Cloth |
Inner Cloth | Teflon Coating Eglass(or Silica) Cloth | |
Insulator | Silica needle mat | |
Element | Ni-Cr | |
Sensor | K-Type, PT100Ω | |
Fastener | Velcro , Snap Button | |
Applications | Process | Etch, Diffusion, CVD, Metal, Clean |
Section of use | Fore Line, Exhaust Line, Inside the facility(Pump, Scrubber, etc.) |
This product is made of 100% PTFE sheet fabric and demonstrates
excellent performance in durability and particle management.
This product is optimized for environmental stability
in a semiconductor clean room and is used to ensure a smooth flow
of each process by installing it inside major facilities such as clean
room and equipment at semiconductor and major industrial sites.
Item No. ATPSH Series | ||
---|---|---|
Spec | Operating Temp | Standard Temp. 260 ℃ Max. Temp. 300℃ |
Voltage | 100V ~ 220V * 50/60Hz | |
Materials | Outer Cloth | 100% PTFE Sheet |
Inner Cloth | 100% PTFE Sheet | |
Insulator | Silica needle mat | |
Element | Ni-Cr | |
Sensor | K-Type, PT100Ω | |
Fastener | Velcro , Snap Button | |
Applications | Process | Etch, Diffusion, CVD, Metal, Clean |
Section of use | Fore Line, Exhaust Line, Inside the facility(Pump, Scrubber, etc.) |