适用Silicone Coated Cloth面料的产品, 是产业现场
使用最多的产品, 安装在半导体的真空线、气体线、罐车等
广泛的现场, 用于保证各工程的流程顺畅。
ATNH Series | ||
---|---|---|
Spec | Operating Temp | Standard Temp. 180 ℃ Max. Temp. 200℃ |
Voltage | 100V ~ 220V * 50/60Hz | |
Materials | Outer Cloth | Silicon Coating E-glass Cloth |
Inner Cloth | Silicon Coating E-glass Cloth | |
Insulator | Silica needle mat | |
Element | Ni-Cr | |
Sensor | K-Type, PT100Ω | |
Fastener | Velcro , Snap Button | |
Applications | Process | Etch, Diffusion, CVD, Metal, Clean |
Section of use | Fore Line, Exhaust Line, Inside the facility(Pump, Scrubber, etc.) |
适用PTFE Coated Cloth面料的产品, 主要在高温或需要
Particle管理的现场使用的产品群,
主要安装在半导体现场的洁净室、设备等主要装备的内部,
用于确保各工程的流程顺畅。
Item No. ATPH Series | ||
---|---|---|
Spec | Operating Temp | Standard Temp. 260 ℃ Max. Temp. 300℃ |
Voltage | 100V ~ 220V * 50/60Hz | |
Materials | Outer Cloth | Teflon Coating Eglass Cloth |
Inner Cloth | Teflon Coating Eglass(or Silica) Cloth | |
Insulator | Silica needle mat | |
Element | Ni-Cr | |
Sensor | K-Type, PT100Ω | |
Fastener | Velcro , Snap Button | |
Applications | Process | Etch, Diffusion, CVD, Metal, Clean |
Section of use | Fore Line, Exhaust Line, Inside the facility(Pump, Scrubber, etc.) |
适用100% PTFE Sheet面料的产品, 可在耐久性和Particle管理上
发挥卓越的性能。
在半导体洁净室环境中优化于环境稳定性的产品,
安装在半导体和主要产业现场的洁净室、设备等主要装备的内部,
用于确保各工程的流程顺畅。
Item No. ATPSH Series | ||
---|---|---|
Spec | Operating Temp | Standard Temp. 260 ℃ Max. Temp. 300℃ |
Voltage | 100V ~ 220V * 50/60Hz | |
Materials | Outer Cloth | 100% PTFE Sheet |
Inner Cloth | 100% PTFE Sheet | |
Insulator | Silica needle mat | |
Element | Ni-Cr | |
Sensor | K-Type, PT100Ω | |
Fastener | Velcro , Snap Button | |
Applications | Process | Etch, Diffusion, CVD, Metal, Clean |
Section of use | Fore Line, Exhaust Line, Inside the facility(Pump, Scrubber, etc.) |